| General Characteristics |
Trichlorosilane is a corrosive, colorless, flammable liquid with a suffocating odor. The vapors are irritating to the mucous membranes and form dense fumes when exposed to humid air. It hydrolyses rapidly in moist air, releasing hydrogen chloride. It is shipped in special stainless steel containers, capable of delivering either vapor or liquid. |
| |
| Physical Properties |
| Molecular Weight |
135.45 |
| Flammability Limits in air |
7.0 - 83.0% |
| Density, Liquid @ Boiling Point, 1 atm |
12.4lb/gal (1.48g/m) |
| Boiling Point |
89.4°F (31.9°C) |
| Melting Point |
-94°F (-70°C) |
| Triple Point @ 5.11 atm |
-69.9°F (-56.6°C) |
| Critical Temperature |
468°F (242.5°C) |
| Critical Pressure |
499.7 psia (34.5 bar) |
| Toxicity (as HCl, a 3 to 1 ratio) |
| PEL/TLV as HCl |
5 ppm |
| LC50 |
1040 ppm |
