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SILICON TETRAFLUORIDE SiF4  

General Characteristics
Silicon Tetrafluoride is a colorless, toxic, nonflammable gas with a suffocating odor. It is irritating to the mucous membranes. Silicon Tetrafluoride forms fumes in humid air, and hyrolyses rapidly to form fluorosilicic acid and hydrogen fluoride. It is shipped as a free gas, and the contents vary with the pressure.
 
Physical Properties
Molecular Weight 104.08
Flammability Limits in air Nonflammable
Specific Gravity,
Gas @ 70°F(21.1°C), 1 atm(Air=1)
3.55
Density,
Gas @ 70°F(21.1°C), 1 atm
0.266lb/ft^3 (4.26g/l)
Specific Volume,
Gas @ 70°F(21.1°C), 1 atm
3.76ft^3/lb (0.23l/g)
Sublimation Point @ 1 atm -139.2°F (-95.1°C)
Freezing Point @ 1 atm -130°F (-90°C)
Critical Temperature 6.5°F (-14.2°C)
Critical Pressure 538.8 psia (37.2 bar)
Toxicity (as HF, a 4 to 1 ratio)
PEL/TLV 3 ppm
STEL 6 ppm
LC50 450 ppm
IDLH 38 ppm
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